Technical data

Description

Secondary electron image resolution

20 nm (guaranteed)

Magnification

20 ~ 300,000 x

Electron gun

Field Emission Electron Gun

Emission extracting voltage

0 ~ 6.3 KV

Accelerating voltage

1 ~ 30 KV

Specimen Stage Motion

X: 0 ~ 25 mm

Y: 0 ~ 25 mm

Z: 5 ~ 30 mm (continuous)

T (tilt): -5^o ~ +45^o (continuous)

R (rotation): 360^o (continuous)

Maximum Specimen size

50 mm (diameter) x 15 mm (high)

Specimen Stub

36, 25, 15 mm (diameter)

Specimen Exchange

Airlock system